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@article{2394537, author = {Dvořák, Jan and Vohánka, Jiří and Buršíková, Vilma and Ohlídal, Ivan}, article_number = {5}, doi = {http://dx.doi.org/10.1016/j.heliyon.2024.e27246}, keywords = {Ellipsometry; Reflectometry; Optical characterization; Polymer-like thin films; Plasma polymer; Inhomogeneity}, language = {eng}, issn = {2405-8440}, journal = {Heliyon}, title = {Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition}, url = {https://www.sciencedirect.com/science/article/pii/S2405844024032778}, volume = {10}, year = {2024} }
TY - JOUR ID - 2394537 AU - Dvořák, Jan - Vohánka, Jiří - Buršíková, Vilma - Ohlídal, Ivan PY - 2024 TI - Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition JF - Heliyon VL - 10 IS - 5 SP - 1-12 EP - 1-12 PB - Elsevier Ltd SN - 24058440 KW - Ellipsometry KW - Reflectometry KW - Optical characterization KW - Polymer-like thin films KW - Plasma polymer KW - Inhomogeneity UR - https://www.sciencedirect.com/science/article/pii/S2405844024032778 N2 - In this study, an optical investigation in a wide spectral range of polymer-like (SiOxCyHz) thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The primary focus is on assessing the homogeneity of the grown films. Within the PECVD, it is possible to alter the properties of the deposited material by continually adjusting deposition process parameters and hence allow for the growth of inhomogeneous layers. However, as shown in this study, the growth of homogeneous layers could be similarly challenging. This challenge is especially pronounced at the beginning of the deposition process, where it is necessary to consider the influence of the substrate among other factors, as even slight variations in the deposition conditions can lead to the formation of inhomogeneous layers. Several series of polymer-like thin films were deposited onto silicon substrates with the goal of producing homogeneous layers, i.e. all deposition parameters were held constant. These samples were optically characterized with a special interest in homogeneity, especially at the beginning of the growth. It was found that initial inhomogeneous growth is always present. The thickness of the initial inhomogeneous part was found to be surprisingly large. ER -
DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition. \textit{Heliyon}. Elsevier Ltd, 2024, roč.~10, č.~5, s.~1-12. ISSN~2405-8440. Dostupné z: https://dx.doi.org/10.1016/j.heliyon.2024.e27246.
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