Optical characterization of inhomogeneity of polymer-like thin
films arising in the initial phase of plasma-enhanced chemical
vapor deposition

J 2024

Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ and Ivan OHLÍDAL

Basic information

Original name

Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

Authors

DVOŘÁK, Jan (203 Czech Republic, guarantor, belonging to the institution), Jiří VOHÁNKA (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Ivan OHLÍDAL (203 Czech Republic, belonging to the institution)

Edition

Heliyon, Elsevier Ltd, 2024, 2405-8440

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 4.000 in 2022

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.heliyon.2024.e27246

UT WoS

001222776100001

Keywords in English

Ellipsometry; Reflectometry; Optical characterization; Polymer-like thin films; Plasma polymer; Inhomogeneity

Abstract

V originále

In this study, an optical investigation in a wide spectral range of polymer-like (SiOxCyHz) thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The primary focus is on assessing the homogeneity of the grown films. Within the PECVD, it is possible to alter the properties of the deposited material by continually adjusting deposition process parameters and hence allow for the growth of inhomogeneous layers. However, as shown in this study, the growth of homogeneous layers could be similarly challenging. This challenge is especially pronounced at the beginning of the deposition process, where it is necessary to consider the influence of the substrate among other factors, as even slight variations in the deposition conditions can lead to the formation of inhomogeneous layers. Several series of polymer-like thin films were deposited onto silicon substrates with the goal of producing homogeneous layers, i.e. all deposition parameters were held constant. These samples were optically characterized with a special interest in homogeneity, especially at the beginning of the growth. It was found that initial inhomogeneous growth is always present. The thickness of the initial inhomogeneous part was found to be surprisingly large.

Links

LM2023039, research and development project

Name: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ and Ivan OHLÍDAL. Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition. Heliyon. Elsevier Ltd, 2024, vol. 10, No 5, p. 1-12. ISSN 2405-8440. Available from: https://dx.doi.org/10.1016/j.heliyon.2024.e27246.

@article{2394537,
   author = {Dvořák, Jan and Vohánka, Jiří and Buršíková, Vilma and Ohlídal, Ivan},
   article_number = {5},
   doi = {http://dx.doi.org/10.1016/j.heliyon.2024.e27246},
   keywords = {Ellipsometry; Reflectometry; Optical characterization; Polymer-like thin films; Plasma polymer; Inhomogeneity},
   language = {eng},
   issn = {2405-8440},
   journal = {Heliyon},
   title = {Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition},
   url = {https://www.sciencedirect.com/science/article/pii/S2405844024032778},
   volume = {10},
   year = {2024}
}

TY  - JOUR
ID  - 2394537
AU  - Dvořák, Jan - Vohánka, Jiří - Buršíková, Vilma - Ohlídal, Ivan
PY  - 2024
TI  - Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition
JF  - Heliyon
VL  - 10
IS  - 5
SP  - 1-12
EP  - 1-12
PB  - Elsevier Ltd
SN  - 24058440
KW  - Ellipsometry
KW  - Reflectometry
KW  - Optical characterization
KW  - Polymer-like thin films
KW  - Plasma polymer
KW  - Inhomogeneity
UR  - https://www.sciencedirect.com/science/article/pii/S2405844024032778
N2  - In this study, an optical investigation in a wide spectral range of polymer-like (SiOxCyHz) thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The primary focus is on assessing the homogeneity of the grown films. Within the PECVD, it is possible to alter the properties of the deposited material by continually adjusting deposition process parameters and hence allow for the growth of inhomogeneous layers. However, as shown in this study, the growth of homogeneous layers could be similarly challenging. This challenge is especially pronounced at the beginning of the deposition process, where it is necessary to consider the influence of the substrate among other factors, as even slight variations in the deposition conditions can lead to the formation of inhomogeneous layers. Several series of polymer-like thin films were deposited onto silicon substrates with the goal of producing homogeneous layers, i.e. all deposition parameters were held constant. These samples were optically characterized with a special interest in homogeneity, especially at the beginning of the growth. It was found that initial inhomogeneous growth is always present. The thickness of the initial inhomogeneous part was found to be surprisingly large.
ER  -

DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ and Ivan OHLÍDAL. Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition. \textit{Heliyon}. Elsevier Ltd, 2024, vol.~10, No~5, p.~1-12. ISSN~2405-8440. Available from: https://dx.doi.org/10.1016/j.heliyon.2024.e27246.

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