Spatially resolved optical emission analysis of spokes in
HiPIMS utilising Al, Cr, Cu, Ti, and W targets

J 2024

Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets

HNILICA, Jaroslav, Marta ŠLAPANSKÁ, Michael KROKER, Peter KLEIN, Petr VAŠINA et. al.

Basic information

Original name

Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets

Authors

HNILICA, Jaroslav (203 Czech Republic, belonging to the institution), Marta ŠLAPANSKÁ (203 Czech Republic, belonging to the institution), Michael KROKER (203 Czech Republic, belonging to the institution), Peter KLEIN (703 Slovakia, belonging to the institution) and Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution)

Edition

Plasma Sources Science and Technology, IOP Publishing Ltd, 2024, 0963-0252

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 3.800 in 2022

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1088/1361-6595/ad546b

UT WoS

001250044700001

Keywords in English

HiPIMS; spokes; ionisation zones; OES; magnetron sputtering; floating potential

Abstract

V originále

Investigating spokes in high-power impulse magnetron sputtering discharge requires non-invasive diagnostic methods to characterise accurately spoke properties. A fast photodiode and a cylindrical Langmuir probe were employed to synchronise the moment of acquisition of the optical emission spectrum with the position of a passing spoke. This study provides statistical data analysis to bring insights into spoke characteristics in a non-reactive argon atmosphere, employing aluminium, chromium, copper, titanium, and tungsten targets. Utilising different target materials, the objective is to describe basic parameters such as shape, length, and propagation velocity of spokes and also analyse spoke inner parameters such as floating potential and spectral emission, under nearly identical experimental conditions. From the optical emission, the most prominent species within the spoke were determined. Additionally, the mechanism governing spoke movement was described using a phenomenological model.

Links

LM2018097, research and development project

Name: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Acronym: CEPLANT)

Investor: Ministry of Education, Youth and Sports of the CR

Citovat

HNILICA, Jaroslav, Marta ŠLAPANSKÁ, Michael KROKER, Peter KLEIN and Petr VAŠINA. Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets. Plasma Sources Science and Technology. IOP Publishing Ltd, 2024, vol. 33, No 6, p. 1-11. ISSN 0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/ad546b.

@article{2412397,
   author = {Hnilica, Jaroslav and Šlapanská, Marta and Kroker, Michael and Klein, Peter and Vašina, Petr},
   article_number = {6},
   doi = {http://dx.doi.org/10.1088/1361-6595/ad546b},
   keywords = {HiPIMS; spokes; ionisation zones; OES; magnetron sputtering; floating potential},
   language = {eng},
   issn = {0963-0252},
   journal = {Plasma Sources Science and Technology},
   title = {Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets},
   url = {https://iopscience.iop.org/article/10.1088/1361-6595/ad546b},
   volume = {33},
   year = {2024}
}

TY  - JOUR
ID  - 2412397
AU  - Hnilica, Jaroslav - Šlapanská, Marta - Kroker, Michael - Klein, Peter - Vašina, Petr
PY  - 2024
TI  - Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets
JF  - Plasma Sources Science and Technology
VL  - 33
IS  - 6
SP  - 1-11
EP  - 1-11
PB  - IOP Publishing Ltd
SN  - 09630252
KW  - HiPIMS
KW  - spokes
KW  - ionisation zones
KW  - OES
KW  - magnetron sputtering
KW  - floating potential
UR  - https://iopscience.iop.org/article/10.1088/1361-6595/ad546b
N2  - Investigating spokes in high-power impulse magnetron sputtering discharge requires non-invasive diagnostic methods to characterise accurately spoke properties. A fast photodiode and a cylindrical Langmuir probe were employed to synchronise the moment of acquisition of the optical emission spectrum with the position of a passing spoke. This study provides statistical data analysis to bring insights into spoke characteristics in a non-reactive argon atmosphere, employing aluminium, chromium, copper, titanium, and tungsten targets. Utilising different target materials, the objective is to describe basic parameters such as shape, length, and propagation velocity of spokes and also analyse spoke inner parameters such as floating potential and spectral emission, under nearly identical experimental conditions. From the optical emission, the most prominent species within the spoke were determined. Additionally, the mechanism governing spoke movement was described using a phenomenological model.
ER  -

HNILICA, Jaroslav, Marta ŠLAPANSKÁ, Michael KROKER, Peter KLEIN and Petr VAŠINA. Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2024, vol.~33, No~6, p.~1-11. ISSN~0963-0252. Available from: https://dx.doi.org/10.1088/1361-6595/ad546b.

Detailed Information on Publication Record