Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition

KELAROVÁ, Štěpánka, Richard VÁCLAVIK, Roman PŘIBYL, Monika STUPAVSKÁ and Vilma BURŠÍKOVÁ. Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition. Diamond and Related Materials. Elsevier, 2024, vol. 147, August 2024, p. 1-12. ISSN 0925-9635. Available from: https://dx.doi.org/10.1016/j.diamond.2024.111233.

Basic information

• Original name: Development of a-C:H coatings doped with trimethylsilyl acetate prepared using plasma enhanced chemical vapor deposition
• Authors: KELAROVÁ, Štěpánka (203 Czech Republic, belonging to the institution), Richard VÁCLAVIK (703 Slovakia, belonging to the institution), Roman PŘIBYL (203 Czech Republic, belonging to the institution), Monika STUPAVSKÁ (703 Slovakia, belonging to the institution) and Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution).
• Edition: Diamond and Related Materials, Elsevier, 2024, 0925-9635.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10300 1.3 Physical sciences
• Country of publisher: Switzerland
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 4.100 in 2022
• Organization unit: Faculty of Science
• Doi: http://dx.doi.org/10.1016/j.diamond.2024.111233
• UT WoS: 001258541800001
• Keywords in English: Trimethylsilyl acetate; PECVD; Nanoindentation; FTIR; & Oslash;S
• Tags: rivok
• Tags: International impact, Reviewed

Abstract

The main aim of the present study was to develop hard a-C:H:SiOx coatings prepared from the unique gaseous mixture of trimethylsilyl acetate (TMSAc) with methane using plasma of RF capacitively coupled glow discharge. Studied coatings were prepared using different methane ratios in TMSAc/CH4 gaseous mixtures ranging from 7.1 % to 85.7 %. Simultaneously, the influence of the power supplied to the discharge (25–100 W) on the properties of resulting coatings was investigated. The presented research work discusses in detail the evolution of chemical composition, mechanical characteristics, and optical properties of resulting coatings depending on variable CH4 ratio and discharge power. Within this study, various materials with the smooth surface structure were achieved. Applying low CH4 ratio and 25 W power led to the formation of soft SiOx CyHz coatings with high content of Si–O and –CH3 groups exhibiting hardness of approx. 0.95 GPa. Gradually increasing the CH4 ratio and discharge power up to the specified limit values (85 % and 100 W, respectively) induced structural changes, resulting in a-C:H:SiOx coatings with a remarkable hardness of 11 GPa and excellent fracture resistance. These attributes are of utmost importance in numerous industrial applications, including anticorrosive coatings, low-friction wear-resistant coatings to prolong the lifetime of car engines, biocompatible coatings, components for plastic molds, as well as parts for optical disc molds and textile machinery.

Links

• GA23-06263S, research and development project: Name: Termofyzikální charakterizace tenkých vrstev

Investor: Czech Science Foundation

• LM2018097, research and development project: Name: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Acronym: CEPLANT)

Investor: Ministry of Education, Youth and Sports of the CR

• LM2023039, research and development project: Name: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav

Investor: Ministry of Education, Youth and Sports of the CR