Exploring different approaches of multipulse HiPIMS

J 2025

Exploring different approaches of multipulse HiPIMS

HNILICA, Jaroslav; Pavel SOUČEK; Martin ONDRYÁŠ; Peter KLEIN; Matej FEKETE et. al.

Basic information

Original name

Exploring different approaches of multipulse HiPIMS

Authors

HNILICA, Jaroslav (203 Czech Republic, guarantor, belonging to the institution); Pavel SOUČEK (203 Czech Republic, belonging to the institution); Martin ONDRYÁŠ (203 Czech Republic, belonging to the institution); Peter KLEIN (703 Slovakia, belonging to the institution); Matej FEKETE (703 Slovakia, belonging to the institution) and Petr VAŠINA (203 Czech Republic, belonging to the institution)

Edition

Surface and Coatings Technology, Elsevier B.V. 2025, 0257-8972

Other information

Language

English

Type of outcome

Article in a journal

Field of Study

10305 Fluids and plasma physics

Country of publisher

Switzerland

Confidentiality degree

is not subject to a state or trade secret

References:

URL

Impact factor

Impact factor: 5.400 in 2023

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.surfcoat.2024.131670

UT WoS

001402232700001

EID Scopus

2-s2.0-85213265299

Keywords in English

Titanium; Microstructure control; Magnetron sputtering; HiPIMS; Multipulse

Abstract

V originále

Three different approaches for using high power impulse magnetron sputtering (HiPIMS) with a titanium target were examined in terms of plasma diagnostics and coating properties. In all three approaches, a 1 kW average power was kept constant. The first approach involves splitting a strong single HiPIMS pulse into multiple evenly distributed weaker pulses by proportionally dividing the period. The second approach is based on the first one, but the pulses are grouped together in a short burst, or pulse package, where the overall period is conserved. Comparing the second approach to the first enables the identification of the effect of pulse grouping. In the third approach, the pulses are also grouped into the pulse package, however, the period is extended proportionally to the number of pulses in the pulse package. This allows for the creation of short bursts of energetic pulses separated by very long off-times while maintaining the duty cycle. In this way, it is possible to determine whether the grouping of the strong pulses into a pulse package is more beneficial for the deposition than the negative effects induced by prolonging the off-time. Plasma diagnostics revealed that grouping the pulses into packages in the second approach resulted in a higher ionised metal flux fraction on the substrate compared to the first approach, which led to stronger ion bombardment of the growing coating, resulting in denser coatings and changes in the crystalline microstructure. The third approach did not increase ionised metal flux fraction significantly but influenced the texture and grain size of the growing films.

Links

90239, large research infrastructures

Name: CEPLANT II

Cite

HNILICA, Jaroslav; Pavel SOUČEK; Martin ONDRYÁŠ; Peter KLEIN; Matej FEKETE and Petr VAŠINA. Exploring different approaches of multipulse HiPIMS. Surface and Coatings Technology. Elsevier B.V., 2025, vol. 496, January, p. 1-11. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2024.131670.

@article{2465090,
   author = {Hnilica, Jaroslav and Souček, Pavel and Ondryáš, Martin and Klein, Peter and Fekete, Matej and Vašina, Petr},
   article_number = {January},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2024.131670},
   keywords = {Titanium; Microstructure control; Magnetron sputtering; HiPIMS; Multipulse},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface and Coatings Technology},
   title = {Exploring different approaches of multipulse HiPIMS},
   url = {https://www.sciencedirect.com/science/article/pii/S0257897224013021},
   volume = {496},
   year = {2025}
}

TY  - JOUR
ID  - 2465090
AU  - Hnilica, Jaroslav - Souček, Pavel - Ondryáš, Martin - Klein, Peter - Fekete, Matej - Vašina, Petr
PY  - 2025
TI  - Exploring different approaches of multipulse HiPIMS
JF  - Surface and Coatings Technology
VL  - 496
IS  - January
SP  - 1-11
EP  - 1-11
PB  - Elsevier B.V.
SN  - 02578972
KW  - Titanium
KW  - Microstructure control
KW  - Magnetron sputtering
KW  - HiPIMS
KW  - Multipulse
UR  - https://www.sciencedirect.com/science/article/pii/S0257897224013021
N2  - Three different approaches for using high power impulse magnetron sputtering (HiPIMS) with a titanium target were examined in terms of plasma diagnostics and coating properties. In all three approaches, a 1 kW average power was kept constant. The first approach involves splitting a strong single HiPIMS pulse into multiple evenly distributed weaker pulses by proportionally dividing the period. The second approach is based on the first one, but the pulses are grouped together in a short burst, or pulse package, where the overall period is conserved. Comparing the second approach to the first enables the identification of the effect of pulse grouping. In the third approach, the pulses are also grouped into the pulse package, however, the period is extended proportionally to the number of pulses in the pulse package. This allows for the creation of short bursts of energetic pulses separated by very long off-times while maintaining the duty cycle. In this way, it is possible to determine whether the grouping of the strong pulses into a pulse package is more beneficial for the deposition than the negative effects induced by prolonging the off-time. Plasma diagnostics revealed that grouping the pulses into packages in the second approach resulted in a higher ionised metal flux fraction on the substrate compared to the first approach, which led to stronger ion bombardment of the growing coating, resulting in denser coatings and changes in the crystalline microstructure. The third approach did not increase ionised metal flux fraction significantly but influenced the texture and grain size of the growing films.
ER  -

HNILICA, Jaroslav; Pavel SOUČEK; Martin ONDRYÁŠ; Peter KLEIN; Matej FEKETE and Petr VAŠINA. Exploring different approaches of multipulse HiPIMS. \textit{Surface and Coatings Technology}. Elsevier B.V., 2025, vol.~496, January, p.~1-11. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2024.131670.

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