D 2000

Atomic force microscopy measurements of surface roughness quantities important in optics of surfaces and thin films

OHLÍDAL, Ivan, Daniel FRANTA and Petr KLAPETEK

Basic information

Original name

Atomic force microscopy measurements of surface roughness quantities important in optics of surfaces and thin films

Authors

OHLÍDAL, Ivan (203 Czech Republic, guarantor), Daniel FRANTA (203 Czech Republic) and Petr KLAPETEK (203 Czech Republic)

Edition

Braunschweig, Proceedings of the 4th Seminar on Quantitative Microscopy, p. 124-131, 8 pp. 2000

Publisher

Physikalisch-Technische Bundesanstalt

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10302 Condensed matter physics

Country of publisher

Germany

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

RIV identification code

RIV/00216224:14310/00:00002241

Organization unit

Faculty of Science

ISBN

3-89701-503-X
Změněno: 22/12/2003 00:41, Mgr. Daniel Franta, Ph.D.

Abstract

V originále

In this paper AFM measurements of the statistical quantities of randomly rough surfaces important in optics are presented. The procedures enabling us to determine the values of the RMS value of the heights, RMS value of the slopes, autocorrelation function of the heights, power spectral density function, one-dimensional distribution of the probability density of the heights and one-dimensional distribution of the probability density of the slopes of the irregularities of roughness of these surfaces on basis of the AFM data are described. An illustration of these procedures is performed using the results achieved for randomly rough surfaces of silicon. A comparison of these AFM results with those obtained for the same samples by the optical method is also introduced in this paper.

Links

GA101/98/0772, research and development project
Name: Návrh a konstrukce zařízení pro in-situ měření plošné homogenity tenkých vrstev
Investor: Czech Science Foundation, Design and construction of the equipment for in-situ measurement of thin film surface homogeneity
GA202/98/0988, research and development project
Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod
Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
GV106/96/K245, research and development project
Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy
Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes
VS96084, research and development project
Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze
Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague