Analysis of thin films by optical multi-sample methods

FRANTA, Daniel and Ivan OHLÍDAL. Analysis of thin films by optical multi-sample methods. Acta Physica Slovaca. Bratislava: Institute of Physics, SAS, 2000, vol. 50, No 4, p. 411-421. ISSN 0323-0465.

Basic information

• Original name: Analysis of thin films by optical multi-sample methods
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor) and Ivan OHLÍDAL (203 Czech Republic).
• Edition: Acta Physica Slovaca, Bratislava, Institute of Physics, SAS, 2000, 0323-0465.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: Slovakia
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 0.465
• RIV identification code: RIV/00216224:14310/00:00002317
• Organization unit: Faculty of Science
• UT WoS: 000088911400003

Abstract

In this paper a brief review of the optical methods based on the simultaneous interpretation of the different optical experimental data obtained for thin film systems is presented. These methods are known as the multi-sample methods. It is shown that these optical multi-sample methods are very useful for analyzing many thin film systems. In particular it is illustrated that selected optical multi-sample methods are powerful for studying the following problems: investigations of growing the native oxide layers on the semiconductor surfaces; suppression of the influence of the transition interlayers between the substrates and thin films and determination of the optical constants of bulk materials. Concrete experimental examples demonstrating the foregoing statements are presented in this paper as well.

Links

• GA202/98/0988, research and development project: Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague