| PAVELKA, Radek, Ivan OHLÍDAL, Jan HLÁVKA, Daniel FRANTA and Helmut SITTER. Optical characterization of thin films with randomly rough boundaries using the photovoltage method. Thin Solid Films. UK Oxford: Elsevier science, 2000, vol. 366, No 1, p. 43-50. ISSN 0040-6090. |
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@article{329691,
author = {Pavelka, Radek and Ohlídal, Ivan and Hlávka, Jan and Franta, Daniel and Sitter, Helmut},
article_location = {UK Oxford},
article_number = {1},
keywords = {Photovoltage; Optical properties; Ellipsometry; Reflection spectroscopy},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Optical characterization of thin films with randomly rough boundaries using the photovoltage method},
url = {http://hydra.physics.muni.cz/~franta/bib/TSF366_43.html},
volume = {366},
year = {2000}
}
TY - JOUR
ID - 329691
AU - Pavelka, Radek - Ohlídal, Ivan - Hlávka, Jan - Franta, Daniel - Sitter, Helmut
PY - 2000
TI - Optical characterization of thin films with randomly rough boundaries using the photovoltage method
JF - Thin Solid Films
VL - 366
IS - 1
SP - 43-50
EP - 43-50
PB - Elsevier science
SN - 00406090
KW - Photovoltage
KW - Optical properties
KW - Ellipsometry
KW - Reflection spectroscopy
UR - http://hydra.physics.muni.cz/~franta/bib/TSF366_43.html
N2 - In this paper the determination of the values of the optical parameters of thin films exhibiting randomly rough boundaries using a photovoltage method is presented. This photovoltage method is based on measuring the radiant flux passing through the film studied. Theoretical formulae needed for applying the method are derived. The practical utilization of the method is illustrated by means of characterizing a rough SiO2-film on a silicon single crystal. A correctness of the results achieved for this film is confirmed by values of the optical parameters of the SiO2-film determined by a combined method of spectroscopic ellipsometry and spectroscopic reflectometry. It will also be shown that the photovoltage method enables us to determine the values of the optical parameters of the rough thin films with the randomly rough boundaries in a simpler way than the standard optical methods.
ER -
PAVELKA, Radek, Ivan OHLÍDAL, Jan HLÁVKA, Daniel FRANTA and Helmut SITTER. Optical characterization of thin films with randomly rough boundaries using the photovoltage method. \textit{Thin Solid Films}. UK Oxford: Elsevier science, 2000, vol.~366, No~1, p.~43-50. ISSN~0040-6090.
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