PAVELKA, Radek, Ivan OHLÍDAL, Jan HLÁVKA, Daniel FRANTA and Helmut SITTER. Optical characterization of thin films with randomly rough boundaries using the photovoltage method. Thin Solid Films. UK Oxford: Elsevier science, 2000, vol. 366, No 1, p. 43-50. ISSN 0040-6090. |
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@article{329691, author = {Pavelka, Radek and Ohlídal, Ivan and Hlávka, Jan and Franta, Daniel and Sitter, Helmut}, article_location = {UK Oxford}, article_number = {1}, keywords = {Photovoltage; Optical properties; Ellipsometry; Reflection spectroscopy}, language = {eng}, issn = {0040-6090}, journal = {Thin Solid Films}, title = {Optical characterization of thin films with randomly rough boundaries using the photovoltage method}, url = {http://hydra.physics.muni.cz/~franta/bib/TSF366_43.html}, volume = {366}, year = {2000} }
TY - JOUR ID - 329691 AU - Pavelka, Radek - Ohlídal, Ivan - Hlávka, Jan - Franta, Daniel - Sitter, Helmut PY - 2000 TI - Optical characterization of thin films with randomly rough boundaries using the photovoltage method JF - Thin Solid Films VL - 366 IS - 1 SP - 43-50 EP - 43-50 PB - Elsevier science SN - 00406090 KW - Photovoltage KW - Optical properties KW - Ellipsometry KW - Reflection spectroscopy UR - http://hydra.physics.muni.cz/~franta/bib/TSF366_43.html N2 - In this paper the determination of the values of the optical parameters of thin films exhibiting randomly rough boundaries using a photovoltage method is presented. This photovoltage method is based on measuring the radiant flux passing through the film studied. Theoretical formulae needed for applying the method are derived. The practical utilization of the method is illustrated by means of characterizing a rough SiO2-film on a silicon single crystal. A correctness of the results achieved for this film is confirmed by values of the optical parameters of the SiO2-film determined by a combined method of spectroscopic ellipsometry and spectroscopic reflectometry. It will also be shown that the photovoltage method enables us to determine the values of the optical parameters of the rough thin films with the randomly rough boundaries in a simpler way than the standard optical methods. ER -
PAVELKA, Radek, Ivan OHLÍDAL, Jan HLÁVKA, Daniel FRANTA and Helmut SITTER. Optical characterization of thin films with randomly rough boundaries using the photovoltage method. \textit{Thin Solid Films}. UK Oxford: Elsevier science, 2000, vol.~366, No~1, p.~43-50. ISSN~0040-6090.
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