J 2000

Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry

FRANTA, Daniel and Ivan OHLÍDAL

Basic information

Original name

Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry

Authors

FRANTA, Daniel (203 Czech Republic, guarantor) and Ivan OHLÍDAL (203 Czech Republic)

Edition

Surface and Interface Analysis, USA, John Wiley & Sons, 2000, 0142-2421

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Impact factor

Impact factor: 1.215

RIV identification code

RIV/00216224:14310/00:00002371

Organization unit

Faculty of Science

UT WoS

000089238400124

Keywords in English

Inhomogeneous ZrO2-films; Optical characterization; Spectroscopic ellipsometry; Spectroscopic reflectometry

Tags

Změněno: 22/12/2003 00:49, Mgr. Daniel Franta, Ph.D.

Abstract

V originále

In this paper results concerning the optical characterization of the inhomogeneous thin films of ZrO2 are presented. The optical characterization of these films is performed using the simultaneous interpretation of experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). It is shown that the ZrO2-films exhibit a depth inhomogeneity concerning their refractive indices. Further, it is shown that the ZrO2-films studied can be replaced by the four-layer system from the point of view of satisfactory fits of the experimental data. The values of the thicknesses and spectral dependences of the refractive indices of these four films are determined. Moreover, it is proved that the individual methods, i.e. VASE and especially NNSR, can not be separately used to characterize the ZrO2-films investigated.

Links

GA101/98/0772, research and development project
Name: Návrh a konstrukce zařízení pro in-situ měření plošné homogenity tenkých vrstev
Investor: Czech Science Foundation, Design and construction of the equipment for in-situ measurement of thin film surface homogeneity
GA202/98/0988, research and development project
Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod
Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
GV106/96/K245, research and development project
Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy
Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes
VS96084, research and development project
Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze
Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague