Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry

FRANTA, Daniel and Ivan OHLÍDAL. Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry. Surface and Interface Analysis. USA: John Wiley & Sons, 2000, vol. 30, No 1, p. 574-579. ISSN 0142-2421.

Basic information

• Original name: Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor) and Ivan OHLÍDAL (203 Czech Republic).
• Edition: Surface and Interface Analysis, USA, John Wiley & Sons, 2000, 0142-2421.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 1.215
• RIV identification code: RIV/00216224:14310/00:00002371
• Organization unit: Faculty of Science
• UT WoS: 000089238400124
• Keywords in English: Inhomogeneous ZrO2-films; Optical characterization; Spectroscopic ellipsometry; Spectroscopic reflectometry
• Tags: Inhomogeneous ZrO2-films, optical characterization, spectroscopic ellipsometry, Spectroscopic reflectometry

Abstract

In this paper results concerning the optical characterization of the inhomogeneous thin films of ZrO2 are presented. The optical characterization of these films is performed using the simultaneous interpretation of experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). It is shown that the ZrO2-films exhibit a depth inhomogeneity concerning their refractive indices. Further, it is shown that the ZrO2-films studied can be replaced by the four-layer system from the point of view of satisfactory fits of the experimental data. The values of the thicknesses and spectral dependences of the refractive indices of these four films are determined. Moreover, it is proved that the individual methods, i.e. VASE and especially NNSR, can not be separately used to characterize the ZrO2-films investigated.

Links

• GA101/98/0772, research and development project: Name: Návrh a konstrukce zařízení pro in-situ měření plošné homogenity tenkých vrstev

Investor: Czech Science Foundation, Design and construction of the equipment for in-situ measurement of thin film surface homogeneity

• GA202/98/0988, research and development project: Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague