Characterization of CNx/SiOy Films Prepared by the Inductively Coupled RF Discharge

ELIÁŠ, Marek, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ and Jan JANČA. Characterization of CNx/SiOy Films Prepared by the Inductively Coupled RF Discharge. Czechoslovak Journal of Physics. Praha: Academy of Science of the Czech Republic, 2000, vol. 2000, 50(S3), p. 453-456. ISSN 0011-4626.

Basic information

• Original name: Characterization of CNx/SiOy Films Prepared by the Inductively Coupled RF Discharge
• Authors: ELIÁŠ, Marek (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic).
• Edition: Czechoslovak Journal of Physics, Praha, Academy of Science of the Czech Republic, 2000, 0011-4626.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• Impact factor: Impact factor: 0.298
• RIV identification code: RIV/00216224:14310/00:00002460
• Organization unit: Faculty of Science
• UT WoS: 000173132300081
• Tags: International impact, Reviewed

Abstract

Characterization of CNx/SiOy thin films prepared in the inductively coupled radio-frequency discharge.

Links

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• ME 301, research and development project: Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev

Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings

• ME 367, research and development project: Name: Výzkum a vývoj supertvrdých nanokrystalických kompositních materiálů

Investor: Ministry of Education, Youth and Sports of the CR, Research and development and industrializartion of novel super hard nanocrystalline materials

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates

• OC 527.20, research and development project: Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů

Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague