Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge

ELIÁŠ, Marek, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge. Diamond and Related Materials. New York: Elsevier Science S.A., 2000, vol. 9, No 7, p. 552-555. ISSN 0925-9635.

Basic information

Original name

Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge

Authors

ELIÁŠ, Marek (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic), Jan JANČA (203 Czech Republic) and Michal LORENC (203 Czech Republic)

Edition

Diamond and Related Materials, New York, Elsevier Science S.A. 2000, 0925-9635

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.591

RIV identification code

RIV/00216224:14310/00:00002461

Organization unit

Faculty of Science

Keywords in English

Carbon; Ellipsometry; Nitrides; Mechanical properties

Tags

Carbon, ellipsometry, mechanical properties, Nitrides

Tags

International impact, Reviewed

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Abstract

V originále

Nanocomposite CNx/SiO thin films

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Links

GV106/96/K245, research and development project	Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes
ME 301, research and development project	Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings
ME 367, research and development project	Name: Výzkum a vývoj supertvrdých nanokrystalických kompositních materiálů Investor: Ministry of Education, Youth and Sports of the CR, Research and development and industrializartion of novel super hard nanocrystalline materials
MSM 143100003, plan (intention)	Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
OC 527.20, research and development project	Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
VS96084, research and development project	Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague