Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge

ELIÁŠ, Marek, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Jan JANČA and Michal LORENC. Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge. Online. Diamond and Related Materials. New York: Elsevier Science S.A., 2000, vol. 9, No 7, p. 552-555. ISSN 0925-9635. [citováno 2024-04-24]

Basic information

• Original name: Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge
• Authors: ELIÁŠ, Marek (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic), Jan JANČA (203 Czech Republic) and Michal LORENC (203 Czech Republic)
• Edition: Diamond and Related Materials, New York, Elsevier Science S.A. 2000, 0925-9635.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• Impact factor: Impact factor: 1.591
• RIV identification code: RIV/00216224:14310/00:00002461
• Organization unit: Faculty of Science
• Keywords in English: Carbon; Ellipsometry; Nitrides; Mechanical properties
• Tags: Carbon, ellipsometry, mechanical properties, Nitrides
• Tags: International impact, Reviewed

Abstract

Nanocomposite CNx/SiO thin films

Links

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• ME 301, research and development project: Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev

Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings

• ME 367, research and development project: Name: Výzkum a vývoj supertvrdých nanokrystalických kompositních materiálů

Investor: Ministry of Education, Youth and Sports of the CR, Research and development and industrializartion of novel super hard nanocrystalline materials

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates

• OC 527.20, research and development project: Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů

Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague