C 2000

Ellipsometry of Thin Film Systems

OHLÍDAL, Ivan and Daniel FRANTA

Basic information

Original name

Ellipsometry of Thin Film Systems

Authors

OHLÍDAL, Ivan (203 Czech Republic, guarantor) and Daniel FRANTA (203 Czech Republic)

Edition

1. vyd. Amsterdam, Progress in Optics, Vol. 41 (Ed. E. Wolf), p. 181-282, 102 pp. 2000

Publisher

Elsevier

Other information

Language

English

Type of outcome

Kapitola resp. kapitoly v odborné knize

Field of Study

10306 Optics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

RIV identification code

RIV/00216224:14310/00:00002671

Organization unit

Faculty of Science

ISBN

0-444-568-7

UT WoS

000290881300003
Změněno: 22/12/2003 00:43, Mgr. Daniel Franta, Ph.D.

Abstract

V originále

In this paper, a review of both the important theoretical and experimental results concerning ellipsometry is presented.

Links

GA202/98/0988, research and development project
Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod
Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
VS96084, research and development project
Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze
Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague