| ŠÍCHA, Miloš, Vratislav KAPIČKA, Antonín BRABLEC, Miloš KLÍMA, Pavel SLAVÍČEK, Robert VACULÍK a J.F. BEHNKE. The plasma diagnostics of the RF torch discharge plasma chemical system. Online. In International Symposium, on High Pressure Low Temperature Plasma Chemistry- HAKONE VII, Greifswald-Germany 2000, Contributed Papers. Greifswald: University E.- M. Arndt Greifswald, 2000. s. 509-512. ISBN 3-00-006603-9. [citováno 2024-04-24] |
Další formáty:
BibTeX
LaTeX
RIS
@inproceedings{346340,
author = {Šícha, Miloš and Kapička, Vratislav and Brablec, Antonín and Klíma, Miloš and Slavíček, Pavel and Vaculík, Robert and Behnke, J.F.},
address = {Greifswald},
booktitle = {International Symposium, on High Pressure Low Temperature Plasma Chemistry- HAKONE VII, Greifswald-Germany 2000, Contributed Papers},
keywords = {Torch discharge plasma; surface treatmnet; plasma diagnostics},
language = {eng},
location = {Greifswald},
isbn = {3-00-006603-9},
pages = {509-512},
publisher = {University E.- M. Arndt Greifswald},
title = {The plasma diagnostics of the RF torch discharge plasma chemical system},
year = {2000}
}
TY - JOUR
ID - 346340
AU - Šícha, Miloš - Kapička, Vratislav - Brablec, Antonín - Klíma, Miloš - Slavíček, Pavel - Vaculík, Robert - Behnke, J.F.
PY - 2000
TI - The plasma diagnostics of the RF torch discharge plasma chemical system
PB - University E.- M. Arndt Greifswald
CY - Greifswald
SN - 3000066039
KW - Torch discharge plasma
KW - surface treatmnet
KW - plasma diagnostics
N2 - The possibility to use of special configuration of the torch discharge burning in mixture of argon and n-hexan for deposition of CH thin films on Al and Cu substrate is reported. Basic parameters of the diacharge is studied using emission spectroscopy.
ER -
ŠÍCHA, Miloš, Vratislav KAPIČKA, Antonín BRABLEC, Miloš KLÍMA, Pavel SLAVÍČEK, Robert VACULÍK a J.F. BEHNKE. The plasma diagnostics of the RF torch discharge plasma chemical system. Online. In \textit{International Symposium, on High Pressure Low Temperature Plasma Chemistry- HAKONE VII, Greifswald-Germany 2000, Contributed Papers}. Greifswald: University E.- M. Arndt Greifswald, 2000. s.~509-512. ISBN~3-00-006603-9. [citováno 2024-04-24]
|
