| ZAJÍČKOVÁ, Lenka, Vratislav PEŘINA, Vilma BURŠÍKOVÁ, Anna MACKOVÁ and Jan JANČA. Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures. In Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases. Miskolc - Lillafüred, Hungary: European Physical Society, 2000, p. 448-449. |
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@inproceedings{357861,
author = {Zajíčková, Lenka and Peřina, Vratislav and Buršíková, Vilma and Macková, Anna and Janča, Jan},
address = {Miskolc - Lillafüred, Hungary},
booktitle = {Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases},
keywords = {Thin Films; PECVD; Hexamethyldisiloxane; RF discharge; RBS; ERD; FTIR; Polycarbonate},
language = {eng},
location = {Miskolc - Lillafüred, Hungary},
pages = {448-449},
publisher = {European Physical Society},
title = {Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures},
year = {2000}
}
TY - JOUR
ID - 357861
AU - Zajíčková, Lenka - Peřina, Vratislav - Buršíková, Vilma - Macková, Anna - Janča, Jan
PY - 2000
TI - Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures
PB - European Physical Society
CY - Miskolc - Lillafüred, Hungary
KW - Thin Films
KW - PECVD
KW - Hexamethyldisiloxane
KW - RF discharge
KW - RBS
KW - ERD
KW - FTIR
KW - Polycarbonate
N2 - The composition of films, deposited from hexamethyldisiloxane/oxygen mixtures was studied by FTIR transmittance measurements, Rutherford backscattering method (RBS) and elastic recoil detection (ERD). Films were characterized by the ellipsometry, the morphology of the film surfaces was studied by SEM and the mechanical properties of films were characterized by Vickers indentation technique.
ER -
ZAJÍČKOVÁ, Lenka, Vratislav PEŘINA, Vilma BURŠÍKOVÁ, Anna MACKOVÁ and Jan JANČA. Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures. In \textit{Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases}. Miskolc - Lillafüred, Hungary: European Physical Society, 2000, p.~448-449.
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