HUMLÍČEK, Josef. OPTICAL-SPECTRA OF SIXGE1-X ALLOYS. J. Appl. Phys. USA: American Institute of Physics, 1989, vol. 65, No 7, p. 2827-2832. ISSN 0021-8979.
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Basic information
Original name OPTICAL-SPECTRA OF SIXGE1-X ALLOYS
Authors HUMLÍČEK, Josef.
Edition J. Appl. Phys. USA, American Institute of Physics, 1989, 0021-8979.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
Changed by Changed by: prof. RNDr. Josef Humlíček, CSc., učo 307. Changed: 9/11/2001 11:07.
Abstract
We report pseudodielectric functions of SiGe alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.8-5,6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layerede structures.
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