OPTICAL-SPECTRA OF SIXGE1-X ALLOYS

HUMLÍČEK, Josef. OPTICAL-SPECTRA OF SIXGE1-X ALLOYS. J. Appl. Phys. USA: American Institute of Physics, 1989, vol. 65, No 7, p. 2827-2832. ISSN 0021-8979.

Basic information

Original name

OPTICAL-SPECTRA OF SIXGE1-X ALLOYS

Authors

HUMLÍČEK, Josef

Edition

J. Appl. Phys. USA, American Institute of Physics, 1989, 0021-8979

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Other information

Language

English

Type of outcome

Article in a journal

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

is not subject to a state or trade secret

Organization unit

Faculty of Science

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Abstract

V originále

We report pseudodielectric functions of SiGe alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.8-5,6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layerede structures.