MIKULÍK, Petr, M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, L. ORTEGA, R. TUCOULOU, P. HUDEK and I. KOSTIČ. Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings. J. Phys. D: Appl. Phys. Velká Britanie: IOP Publishing Ltd, 2001, vol. 34, 10A, p. A188, 5 pp. ISSN 0022-3727. |
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@article{362931, author = {Mikulík, Petr and Jergel, M. and Baumbach, T. and Majková, E. and Pinčík, E. and Luby, Š. and Ortega, L. and Tucoulou, R. and Hudek, P. and Kostič, I.}, article_location = {Velká Britanie}, article_number = {10A}, keywords = {reflectivity; xrr; x-uv optics; gratings; w/si; x-ray}, language = {eng}, issn = {0022-3727}, journal = {J. Phys. D: Appl. Phys.}, title = {Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings}, url = {http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001}, volume = {34}, year = {2001} }
TY - JOUR ID - 362931 AU - Mikulík, Petr - Jergel, M. - Baumbach, T. - Majková, E. - Pinčík, E. - Luby, Š. - Ortega, L. - Tucoulou, R. - Hudek, P. - Kostič, I. PY - 2001 TI - Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings JF - J. Phys. D: Appl. Phys. VL - 34 IS - 10A SP - A188 EP - A188 PB - IOP Publishing Ltd SN - 00223727 KW - reflectivity KW - xrr KW - x-uv optics KW - gratings KW - w/si KW - x-ray UR - http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001 N2 - Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study. ER -
MIKULÍK, Petr, M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, L. ORTEGA, R. TUCOULOU, P. HUDEK and I. KOSTIČ. Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings. \textit{J. Phys. D: Appl. Phys.}. Velká Britanie: IOP Publishing Ltd, 2001, vol.~34, 10A, p.~A188, 5 pp. ISSN~0022-3727.
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