Coplanar and non-coplanar x-ray reflectivity characterization
of lateral W/Si multilayer gratings

J 2001

Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

MIKULÍK, Petr, M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK et. al.

Basic information

Original name

Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

Authors

MIKULÍK, Petr (203 Czech Republic, guarantor), M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, L. ORTEGA, R. TUCOULOU, P. HUDEK and I. KOSTIČ

Edition

J. Phys. D: Appl. Phys. Velká Britanie, IOP Publishing Ltd, 2001, 0022-3727

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 1.260

RIV identification code

RIV/00216224:14310/01:00004228

Organization unit

Faculty of Science

UT WoS

000169093700040

Keywords in English

reflectivity; xrr; x-uv optics; gratings; w/si; x-ray

Abstract

V originále

Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.

Links

GA202/99/P064, research and development project

Name: Studium morfologie rozhraní epitaxních multivrstev RTG reflexí

Investor: Czech Science Foundation, Study of the interface morphology in epitaxial multilayers by X-ray reflection

VS96102, research and development project

Name: Laboratoř tenkých vrstev a nanostruktur

Investor: Ministry of Education, Youth and Sports of the CR, Laboratory of thin films and nanostructures

Citovat

MIKULÍK, Petr, M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, L. ORTEGA, R. TUCOULOU, P. HUDEK and I. KOSTIČ. Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings. J. Phys. D: Appl. Phys. Velká Britanie: IOP Publishing Ltd, 2001, vol. 34, 10A, p. A188, 5 pp. ISSN 0022-3727.

@article{362931,
   author = {Mikulík, Petr and Jergel, M. and Baumbach, T. and Majková, E. and Pinčík, E. and Luby, Š. and Ortega, L. and Tucoulou, R. and Hudek, P. and Kostič, I.},
   article_location = {Velká Britanie},
   article_number = {10A},
   keywords = {reflectivity; xrr; x-uv optics; gratings; w/si; x-ray},
   language = {eng},
   issn = {0022-3727},
   journal = {J. Phys. D: Appl. Phys.},
   title = {Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings},
   url = {http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001},
   volume = {34},
   year = {2001}
}

TY  - JOUR
ID  - 362931
AU  - Mikulík, Petr - Jergel, M. - Baumbach, T. - Majková, E. - Pinčík, E. - Luby, Š. - Ortega, L. - Tucoulou, R. - Hudek, P. - Kostič, I.
PY  - 2001
TI  - Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings
JF  - J. Phys. D: Appl. Phys.
VL  - 34
IS  - 10A
SP  - A188
EP  - A188
PB  - IOP Publishing Ltd
SN  - 00223727
KW  - reflectivity
KW  - xrr
KW  - x-uv optics
KW  - gratings
KW  - w/si
KW  - x-ray
UR  - http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001
N2  - Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.
ER  -

MIKULÍK, Petr, M. JERGEL, T. BAUMBACH, E. MAJKOVÁ, E. PINČÍK, Š. LUBY, L. ORTEGA, R. TUCOULOU, P. HUDEK and I. KOSTIČ. Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings. \textit{J. Phys. D: Appl. Phys.}. Velká Britanie: IOP Publishing Ltd, 2001, vol.~34, 10A, p.~A188, 5 pp. ISSN~0022-3727.

Detailed Information on Publication Record