FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL and Jan JANČA. Optical Characterization of Diamond-like Carbon Films. Vacuum. USA: ELSEVIER (PERGAMON), 2001, vol. 61, 2-4, p. 279-283. ISSN 0042-207X. |
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@article{366093, author = {Franta, Daniel and Zajíčková, Lenka and Ohlídal, Ivan and Janča, Jan}, article_location = {USA}, article_number = {2-4}, keywords = {DLC films; Ellipsometry; Optical properties; Amorphous materials}, language = {eng}, issn = {0042-207X}, journal = {Vacuum}, title = {Optical Characterization of Diamond-like Carbon Films}, url = {http://hydra.physics.muni.cz/~franta/bib/VAC61_279.html}, volume = {61}, year = {2001} }
TY - JOUR ID - 366093 AU - Franta, Daniel - Zajíčková, Lenka - Ohlídal, Ivan - Janča, Jan PY - 2001 TI - Optical Characterization of Diamond-like Carbon Films JF - Vacuum VL - 61 IS - 2-4 SP - 279-283 EP - 279-283 PB - ELSEVIER (PERGAMON) SN - 0042207X KW - DLC films KW - Ellipsometry KW - Optical properties KW - Amorphous materials UR - http://hydra.physics.muni.cz/~franta/bib/VAC61_279.html N2 - In this contribution the results achieved by the optical characterization of diamond like carbon (DLC) films are presented. A multi-sample modification of variable angle of incidence spectroscopic ellipsometry (VASE) is used to determine the values of the thicknesses and spectral dependences of the optical constants of these films. It is shown that this optical method is very suitable for characterizing the films studied because the influences of some defects of these films are suppressed within this method. Further the spectral dependences of the optical constants determined for the DLC films studied are interpreted using a new model of dispersion based on the existence of two oscillators corresponding to both the pi-pi* and sigma-sigma* interband transitions. Within this model of dispersion of the optical constants the concept of the band gap is respected as well. ER -
FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL and Jan JANČA. Optical Characterization of Diamond-like Carbon Films. \textit{Vacuum}. USA: ELSEVIER (PERGAMON), 2001, vol.~61, 2-4, p.~279-283. ISSN~0042-207X.
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