Optical Characterization of Diamond-like Carbon Films

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL and Jan JANČA. Optical Characterization of Diamond-like Carbon Films. Vacuum. USA: ELSEVIER (PERGAMON), 2001, vol. 61, 2-4, p. 279-283. ISSN 0042-207X.

Basic information

Original name

Optical Characterization of Diamond-like Carbon Films

Authors

FRANTA, Daniel (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Ivan OHLÍDAL (203 Czech Republic) and Jan JANČA (203 Czech Republic)

Edition

Vacuum, USA, ELSEVIER (PERGAMON), 2001, 0042-207X

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 0.541

RIV identification code

RIV/00216224:14310/01:00004311

Organization unit

Faculty of Science

UT WoS

000168796500034

Keywords in English

DLC films; Ellipsometry; Optical properties; Amorphous materials

Tags

Amorphous materials, DLC films, ellipsometry, Optical properties

Tags

International impact, Reviewed

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Abstract

V originále

In this contribution the results achieved by the optical characterization of diamond like carbon (DLC) films are presented. A multi-sample modification of variable angle of incidence spectroscopic ellipsometry (VASE) is used to determine the values of the thicknesses and spectral dependences of the optical constants of these films. It is shown that this optical method is very suitable for characterizing the films studied because the influences of some defects of these films are suppressed within this method. Further the spectral dependences of the optical constants determined for the DLC films studied are interpreted using a new model of dispersion based on the existence of two oscillators corresponding to both the pi-pi* and sigma-sigma* interband transitions. Within this model of dispersion of the optical constants the concept of the band gap is respected as well.

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Links

GA202/00/P037, research and development project	Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
GA202/98/0988, research and development project	Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
GV106/96/K245, research and development project	Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes
MSM 143100003, plan (intention)	Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
VS96084, research and development project	Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague