Optical Characterization of Diamond-like Carbon Films

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL and Jan JANČA. Optical Characterization of Diamond-like Carbon Films. Vacuum. USA: ELSEVIER (PERGAMON), 2001, vol. 61, 2-4, p. 279-283. ISSN 0042-207X.

Basic information

• Original name: Optical Characterization of Diamond-like Carbon Films
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Ivan OHLÍDAL (203 Czech Republic) and Jan JANČA (203 Czech Republic).
• Edition: Vacuum, USA, ELSEVIER (PERGAMON), 2001, 0042-207X.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 0.541
• RIV identification code: RIV/00216224:14310/01:00004311
• Organization unit: Faculty of Science
• UT WoS: 000168796500034
• Keywords in English: DLC films; Ellipsometry; Optical properties; Amorphous materials
• Tags: Amorphous materials, DLC films, ellipsometry, Optical properties
• Tags: International impact, Reviewed

Abstract

In this contribution the results achieved by the optical characterization of diamond like carbon (DLC) films are presented. A multi-sample modification of variable angle of incidence spectroscopic ellipsometry (VASE) is used to determine the values of the thicknesses and spectral dependences of the optical constants of these films. It is shown that this optical method is very suitable for characterizing the films studied because the influences of some defects of these films are suppressed within this method. Further the spectral dependences of the optical constants determined for the DLC films studied are interpreted using a new model of dispersion based on the existence of two oscillators corresponding to both the pi-pi* and sigma-sigma* interband transitions. Within this model of dispersion of the optical constants the concept of the band gap is respected as well.

Links

• GA202/00/P037, research and development project: Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu

Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used

• GA202/98/0988, research and development project: Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague