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@book{366896,
author = {Kodas, T. and HampdenandSmith, M.},
address = {Weinheim},
language = {eng},
location = {Weinheim},
isbn = {3-527-29071-0},
publisher = {VCH Weinheim},
title = {The Chemistry of Metal CVD},
year = {1994}
}
TY - BOOK
ID - 366896
AU - Kodas, T. - Hampden-Smith, M.
PY - 1994
TI - The Chemistry of Metal CVD
PB - VCH Weinheim
CY - Weinheim
SN - 3527290710
ER -
KODAS, T. and M. HAMPDEN-SMITH. \textit{The Chemistry of Metal CVD}. Weinheim: VCH Weinheim, 1994. ISBN~3-527-29071-0.
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