Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy

FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Pavel POKORNÝ and Miloslav OHLÍDAL. Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy. Surface and Interface Analysis. USA: John Wiley & Sons, 2001, vol. 32, No 1, p. 91-94. ISSN 0142-2421.

Basic information

• Original name: Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic), Petr KLAPETEK (203 Czech Republic), Pavel POKORNÝ (203 Czech Republic) and Miloslav OHLÍDAL (203 Czech Republic).
• Edition: Surface and Interface Analysis, USA, John Wiley & Sons, 2001, 0142-2421.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 0.987
• RIV identification code: RIV/00216224:14310/01:00004374
• Organization unit: Faculty of Science
• UT WoS: 000170551800020
• Keywords in English: inhomogeneous ZrO2 films; optical characterization; AFM
• Tags: AFM, inhomogeneous ZrO2 films, optical characterization

Abstract

In this paper results concerning the complete optical analysis of inhomogeneous ZrO2-films are introduced. The optical analysis of these films is carried out using the combined optical method based on interpreting experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). The model of the ZrO2-films used for the interpretation of the experimental data achieved using the combined method exhibits the continuous refractive index profile. It is shown that this model is satisfactory for treating the experimental data. Further, it is shown that all the parameters characterizing the model mentioned can be determined with a hight accuracy. By means of atomic force microscopy (AFM) it is found that the upper boundaries of the inhomogeneous ZrO2-films are slightly rough. The values of the basic statistical quantities characterizing this boundary roughness are evaluated using the treatment of AFM data. The optical inhomogeneity of the ZrO2-films studied is explained by the existence of the columnar structure of these films.

Links

• GA101/98/0772, research and development project: Name: Návrh a konstrukce zařízení pro in-situ měření plošné homogenity tenkých vrstev

Investor: Czech Science Foundation, Design and construction of the equipment for in-situ measurement of thin film surface homogeneity

• GA202/98/0988, research and development project: Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods

• GV106/96/K245, research and development project: Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes

• VS96084, research and development project: Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague