FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Pavel POKORNÝ and Miloslav OHLÍDAL. Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy. Surface and Interface Analysis. USA: John Wiley & Sons, 2001, vol. 32, No 1, p. 91-94. ISSN 0142-2421. |
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@article{367252, author = {Franta, Daniel and Ohlídal, Ivan and Klapetek, Petr and Pokorný, Pavel and Ohlídal, Miloslav}, article_location = {USA}, article_number = {1}, keywords = {inhomogeneous ZrO2 films; optical characterization; AFM}, language = {eng}, issn = {0142-2421}, journal = {Surface and Interface Analysis}, title = {Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy}, url = {http://hydra.physics.muni.cz/~franta/bib/SIA32_91.html}, volume = {32}, year = {2001} }
TY - JOUR ID - 367252 AU - Franta, Daniel - Ohlídal, Ivan - Klapetek, Petr - Pokorný, Pavel - Ohlídal, Miloslav PY - 2001 TI - Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy JF - Surface and Interface Analysis VL - 32 IS - 1 SP - 91-94 EP - 91-94 PB - John Wiley & Sons SN - 01422421 KW - inhomogeneous ZrO2 films KW - optical characterization KW - AFM UR - http://hydra.physics.muni.cz/~franta/bib/SIA32_91.html N2 - In this paper results concerning the complete optical analysis of inhomogeneous ZrO2-films are introduced. The optical analysis of these films is carried out using the combined optical method based on interpreting experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). The model of the ZrO2-films used for the interpretation of the experimental data achieved using the combined method exhibits the continuous refractive index profile. It is shown that this model is satisfactory for treating the experimental data. Further, it is shown that all the parameters characterizing the model mentioned can be determined with a hight accuracy. By means of atomic force microscopy (AFM) it is found that the upper boundaries of the inhomogeneous ZrO2-films are slightly rough. The values of the basic statistical quantities characterizing this boundary roughness are evaluated using the treatment of AFM data. The optical inhomogeneity of the ZrO2-films studied is explained by the existence of the columnar structure of these films. ER -
FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Pavel POKORNÝ and Miloslav OHLÍDAL. Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy. \textit{Surface and Interface Analysis}. USA: John Wiley \&{} Sons, 2001, vol.~32, No~1, p.~91-94. ISSN~0142-2421.
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