Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy

FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Pavel POKORNÝ and Miloslav OHLÍDAL. Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy. Surface and Interface Analysis. USA: John Wiley & Sons, 2001, vol. 32, No 1, p. 91-94. ISSN 0142-2421.

Basic information

Original name

Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy

Authors

FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic), Petr KLAPETEK (203 Czech Republic), Pavel POKORNÝ (203 Czech Republic) and Miloslav OHLÍDAL (203 Czech Republic)

Edition

Surface and Interface Analysis, USA, John Wiley & Sons, 2001, 0142-2421

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 0.987

RIV identification code

RIV/00216224:14310/01:00004374

Organization unit

Faculty of Science

UT WoS

000170551800020

Keywords in English

inhomogeneous ZrO2 films; optical characterization; AFM

Tags

AFM, inhomogeneous ZrO2 films, optical characterization

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Abstract

V originále

In this paper results concerning the complete optical analysis of inhomogeneous ZrO2-films are introduced. The optical analysis of these films is carried out using the combined optical method based on interpreting experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). The model of the ZrO2-films used for the interpretation of the experimental data achieved using the combined method exhibits the continuous refractive index profile. It is shown that this model is satisfactory for treating the experimental data. Further, it is shown that all the parameters characterizing the model mentioned can be determined with a hight accuracy. By means of atomic force microscopy (AFM) it is found that the upper boundaries of the inhomogeneous ZrO2-films are slightly rough. The values of the basic statistical quantities characterizing this boundary roughness are evaluated using the treatment of AFM data. The optical inhomogeneity of the ZrO2-films studied is explained by the existence of the columnar structure of these films.

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Links

GA101/98/0772, research and development project	Name: Návrh a konstrukce zařízení pro in-situ měření plošné homogenity tenkých vrstev Investor: Czech Science Foundation, Design and construction of the equipment for in-situ measurement of thin film surface homogeneity
GA202/98/0988, research and development project	Name: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
GV106/96/K245, research and development project	Name: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy Investor: Czech Science Foundation, Hard and superhard coatings prepared by unconventional plasma processes
VS96084, research and development project	Name: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague