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@inproceedings{372371,
author = {Subedi, Deepak Prasad and Zajíčková, Lenka and Buršíková, Vilma and Janča, Jan},
address = {Praha},
booktitle = {WDS'01 Proceedings of Contributed Papers},
edition = {1},
keywords = {rf plasma; emission sectroscopy; rotational temperature; actinometry},
language = {eng},
location = {Praha},
isbn = {80-85863-73-1},
pages = {400-405},
publisher = {matfyzpress},
title = {Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy},
year = {2001}
}
TY - JOUR
ID - 372371
AU - Subedi, Deepak Prasad - Zajíčková, Lenka - Buršíková, Vilma - Janča, Jan
PY - 2001
TI - Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy
PB - matfyzpress
CY - Praha
SN - 8085863731
KW - rf plasma
KW - emission sectroscopy
KW - rotational temperature
KW - actinometry
N2 - Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry.
ER -
SUBEDI, Deepak Prasad, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ and Jan JANČA. Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy. In \textit{WDS'01 Proceedings of Contributed Papers}. 1st ed. Praha: matfyzpress, 2001, p.~400-405. ISBN~80-85863-73-1.
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