Other formats:
BibTeX
LaTeX
RIS
@inproceedings{372371, author = {Subedi, Deepak Prasad and Zajíčková, Lenka and Buršíková, Vilma and Janča, Jan}, address = {Praha}, booktitle = {WDS'01 Proceedings of Contributed Papers}, edition = {1}, keywords = {rf plasma; emission sectroscopy; rotational temperature; actinometry}, language = {eng}, location = {Praha}, isbn = {80-85863-73-1}, pages = {400-405}, publisher = {matfyzpress}, title = {Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy}, year = {2001} }
TY - JOUR ID - 372371 AU - Subedi, Deepak Prasad - Zajíčková, Lenka - Buršíková, Vilma - Janča, Jan PY - 2001 TI - Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy PB - matfyzpress CY - Praha SN - 8085863731 KW - rf plasma KW - emission sectroscopy KW - rotational temperature KW - actinometry N2 - Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry. ER -
SUBEDI, Deepak Prasad, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ and Jan JANČA. Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy. In \textit{WDS'01 Proceedings of Contributed Papers}. 1st ed. Praha: matfyzpress, 2001, p.~400-405. ISBN~80-85863-73-1.
|