| RUDAKOWSKI, Siegmar, Dirk MEYER, Lenka ZAJÍČKOVÁ and Klaus WIESEMANN. In situ measurements of the electrical conductivity of a-C:H films in a pulsed rf discharge. In Proceedings of 15th International Symposium on Plasma Chemistry. Orleans (FRance): GREMI, CNRS/University of Orleans, 2001, p. 2463-2468. |
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@inproceedings{374793,
author = {Rudakowski, Siegmar and Meyer, Dirk and Zajíčková, Lenka and Wiesemann, Klaus},
address = {Orleans (FRance)},
booktitle = {Proceedings of 15th International Symposium on Plasma Chemistry},
keywords = {conductivity},
language = {eng},
location = {Orleans (FRance)},
pages = {2463-2468},
publisher = {GREMI, CNRS/University of Orleans},
title = {In situ measurements of the electrical conductivity of a-C:H films in a pulsed rf discharge},
year = {2001}
}
TY - JOUR
ID - 374793
AU - Rudakowski, Siegmar - Meyer, Dirk - Zajíčková, Lenka - Wiesemann, Klaus
PY - 2001
TI - In situ measurements of the electrical conductivity of a-C:H films in a pulsed rf discharge
PB - GREMI, CNRS/University of Orleans
CY - Orleans (FRance)
KW - conductivity
N2 - In situ measurements of the electrical conductivity of a-C:H films in a pulsed rf discharge
ER -
RUDAKOWSKI, Siegmar, Dirk MEYER, Lenka ZAJÍČKOVÁ and Klaus WIESEMANN. In situ measurements of the electrical conductivity of a-C:H films in a pulsed rf discharge. In \textit{Proceedings of 15th International Symposium on Plasma Chemistry}. Orleans (FRance): GREMI, CNRS/University of Orleans, 2001, p.~2463-2468.
|
