J 2001

C-N/MeN nanocomposite coatings, deposition and testing of performance

SOBOTA, Jaroslav, Zdeněk BOCHNÍČEK, Václav HOLÝ, G. SORENSEN, H. JENSEN et. al.

Basic information

Original name

C-N/MeN nanocomposite coatings, deposition and testing of performance

Authors

SOBOTA, Jaroslav, Zdeněk BOCHNÍČEK, Václav HOLÝ, G. SORENSEN and H. JENSEN

Edition

Surface and coating technology, New York, ELSEVIER, 2001, 0257-8972

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.236

RIV identification code

RIV/00216224:14310/01:00004753

Organization unit

Faculty of Science

UT WoS

000171104600097

Keywords in English

thermal stability; friction; X-ray scattering; carbon; NbN; ZrN
Změněno: 26/11/2001 17:36, doc. RNDr. Zdeněk Bochníček, Dr.

Abstract

V originále

The present communication will report on nanostructured multilayer films containing metal nitride (NbN or ZrN) and carbon nitride. Alcatel 650 and Leybold Z550 sputtering systems equipped with two magnetrons and two r.f. generators were used for the deposition of nanocomposite coatings by r.f. reactive sputtering. The composite coatings, typically 2-3 mum thick, were deposited at a total pressure ranging from 0.2 to 1 Pa and at a relatively low substrate temperature not exceeding 200 degreesC. Various substrates, such as silicon, highly polished steel and tungsten carbide were used. The friction coefficient and wear rate were measured at room temperature in a ball-on-disc tribometer. We also investigated the structure of the multilayer by means of low-angle X-ray reflection and high angle X-ray diffraction. We determined the multilayer period and its changes with temperature from X-ray reflection. It follows from the X-ray diffraction that the polycrystalline structure of the multilayer is developed after annealing. Multilayer nanocomposites can be deposited at low substrate temperatures in conventional PVD coaters and they will combine good adhesion, low wear and low friction coefficient in one system.

Links

GA202/98/0569, research and development project
Name: Sledování teplotní stability vrstevnatých systémů vysokorozlišujícími metodami rtg difrakce a optické reflexe rtg záření při žíhání in situ
Investor: Czech Science Foundation, Thermal stability of layered systems studied by high resolution x-ray diffraction and optical reflection of x-rays in situ during annealing
MSM 143100002, plan (intention)
Name: Fyzikální vlastnosti nových materiálů a vrstevnatých struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical properties of new materials and layered structures