Detailed Information on Publication Record
2001
C-N/MeN nanocomposite coatings, deposition and testing of performance
SOBOTA, Jaroslav, Zdeněk BOCHNÍČEK, Václav HOLÝ, G. SORENSEN, H. JENSEN et. al.Basic information
Original name
C-N/MeN nanocomposite coatings, deposition and testing of performance
Authors
SOBOTA, Jaroslav, Zdeněk BOCHNÍČEK, Václav HOLÝ, G. SORENSEN and H. JENSEN
Edition
Surface and coating technology, New York, ELSEVIER, 2001, 0257-8972
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10302 Condensed matter physics
Country of publisher
United States of America
Confidentiality degree
není předmětem státního či obchodního tajemství
Impact factor
Impact factor: 1.236
RIV identification code
RIV/00216224:14310/01:00004753
Organization unit
Faculty of Science
UT WoS
000171104600097
Keywords in English
thermal stability; friction; X-ray scattering; carbon; NbN; ZrN
Tags
Změněno: 26/11/2001 17:36, doc. RNDr. Zdeněk Bochníček, Dr.
Abstract
V originále
The present communication will report on nanostructured multilayer films containing metal nitride (NbN or ZrN) and carbon nitride. Alcatel 650 and Leybold Z550 sputtering systems equipped with two magnetrons and two r.f. generators were used for the deposition of nanocomposite coatings by r.f. reactive sputtering. The composite coatings, typically 2-3 mum thick, were deposited at a total pressure ranging from 0.2 to 1 Pa and at a relatively low substrate temperature not exceeding 200 degreesC. Various substrates, such as silicon, highly polished steel and tungsten carbide were used. The friction coefficient and wear rate were measured at room temperature in a ball-on-disc tribometer. We also investigated the structure of the multilayer by means of low-angle X-ray reflection and high angle X-ray diffraction. We determined the multilayer period and its changes with temperature from X-ray reflection. It follows from the X-ray diffraction that the polycrystalline structure of the multilayer is developed after annealing. Multilayer nanocomposites can be deposited at low substrate temperatures in conventional PVD coaters and they will combine good adhesion, low wear and low friction coefficient in one system.
Links
GA202/98/0569, research and development project |
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MSM 143100002, plan (intention) |
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