J 2002

Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL, Jan JANČA, Kateřina VELTRUSKÁ et. al.

Basic information

Original name

Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry

Authors

FRANTA, Daniel (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Ivan OHLÍDAL (203 Czech Republic), Jan JANČA (203 Czech Republic) and Kateřina VELTRUSKÁ (203 Czech Republic)

Edition

Diamond and Related Materials, Amsterdam, Elsevier, 2002, 0925-9635

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Impact factor

Impact factor: 1.734

RIV identification code

RIV/00216224:14310/02:00005469

Organization unit

Faculty of Science

Keywords in English

DLC films; Ellipsometry; Optical properties; Amorphous materials

Tags

Změněno: 25/12/2003 01:10, Mgr. Daniel Franta, Ph.D.

Abstract

V originále

In the first part, thicknesses and spectral dependences of the optical constants of the diamond like carbon (DLC) films were determined without any parameterization in the range 240-830 nm by multi-sample modification of variable angle spectroscopic ellipsometry (VASE). DLC films were prepared by plasma enhanced chemical vapor deposition (PECVD) onto silicon single crystal substrates. It was shown that the influence of some defects of the DLC films on the optical constants is suppressed by applying the method of multi-sample modification of VASE. In the second part, the spectral dependences of the determined optical constants were interpreted using a recently developed model of dispersion based on the modified Lorentz oscillator. Two modified Lorentz oscillators corresponding to both pi-pi* and sigma-sigma* interband transitions were taken into account. Within this model of dispersion of the optical constants the concept of the band gap and the existence of localized energy states within the band gap were taken into account as well.

Links

GA202/00/P037, research and development project
Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu
Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
GA202/01/1110, research and development project
Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou
Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method
MSM 143100003, plan (intention)
Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates