Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry

FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL, Jan JANČA and Kateřina VELTRUSKÁ. Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry. Diamond and Related Materials. Amsterdam: Elsevier, 2002, vol. 11, No 1, p. 105-117. ISSN 0925-9635.

Basic information

• Original name: Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic), Ivan OHLÍDAL (203 Czech Republic), Jan JANČA (203 Czech Republic) and Kateřina VELTRUSKÁ (203 Czech Republic).
• Edition: Diamond and Related Materials, Amsterdam, Elsevier, 2002, 0925-9635.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10302 Condensed matter physics
• Country of publisher: Netherlands
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 1.734
• RIV identification code: RIV/00216224:14310/02:00005469
• Organization unit: Faculty of Science
• Keywords in English: DLC films; Ellipsometry; Optical properties; Amorphous materials
• Tags: Amorphous materials, DLC films, ellipsometry, Optical properties

Abstract

In the first part, thicknesses and spectral dependences of the optical constants of the diamond like carbon (DLC) films were determined without any parameterization in the range 240-830 nm by multi-sample modification of variable angle spectroscopic ellipsometry (VASE). DLC films were prepared by plasma enhanced chemical vapor deposition (PECVD) onto silicon single crystal substrates. It was shown that the influence of some defects of the DLC films on the optical constants is suppressed by applying the method of multi-sample modification of VASE. In the second part, the spectral dependences of the determined optical constants were interpreted using a recently developed model of dispersion based on the modified Lorentz oscillator. Two modified Lorentz oscillators corresponding to both pi-pi* and sigma-sigma* interband transitions were taken into account. Within this model of dispersion of the optical constants the concept of the band gap and the existence of localized energy states within the band gap were taken into account as well.

Links

• GA202/00/P037, research and development project: Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu

Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used

• GA202/01/1110, research and development project: Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates