| FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL, Jan JANČA a Kateřina VELTRUSKÁ. Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry. Diamond and Related Materials. Amsterdam: Elsevier, 2002, roč. 11, č. 1, s. 105-117. ISSN 0925-9635. |
Další formáty:
BibTeX
LaTeX
RIS
@article{392491,
author = {Franta, Daniel and Zajíčková, Lenka and Ohlídal, Ivan and Janča, Jan and Veltruská, Kateřina},
article_location = {Amsterdam},
article_number = {1},
keywords = {DLC films; Ellipsometry; Optical properties; Amorphous materials},
language = {eng},
issn = {0925-9635},
journal = {Diamond and Related Materials},
title = {Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry},
url = {http://hydra.physics.muni.cz/~franta/bib/DRM11_105.html},
volume = {11},
year = {2002}
}
TY - JOUR
ID - 392491
AU - Franta, Daniel - Zajíčková, Lenka - Ohlídal, Ivan - Janča, Jan - Veltruská, Kateřina
PY - 2002
TI - Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry
JF - Diamond and Related Materials
VL - 11
IS - 1
SP - 105-117
EP - 105-117
PB - Elsevier
SN - 09259635
KW - DLC films
KW - Ellipsometry
KW - Optical properties
KW - Amorphous materials
UR - http://hydra.physics.muni.cz/~franta/bib/DRM11_105.html
N2 - In the first part, thicknesses and spectral dependences of the optical constants of the diamond like carbon (DLC) films were determined without any parameterization in the range 240-830 nm by multi-sample modification of variable angle spectroscopic ellipsometry (VASE). DLC films were prepared by plasma enhanced chemical vapor deposition (PECVD) onto silicon single crystal substrates. It was shown that the influence of some defects of the DLC films on the optical constants is suppressed by applying the method of multi-sample modification of VASE. In the second part, the spectral dependences of the determined optical constants were interpreted using a recently developed model of dispersion based on the modified Lorentz oscillator. Two modified Lorentz oscillators corresponding to both pi-pi* and sigma-sigma* interband transitions were taken into account. Within this model of dispersion of the optical constants the concept of the band gap and the existence of localized energy states within the band gap were taken into account as well.
ER -
FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Ivan OHLÍDAL, Jan JANČA a Kateřina VELTRUSKÁ. Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry. \textit{Diamond and Related Materials}. Amsterdam: Elsevier, 2002, roč.~11, č.~1, s.~105-117. ISSN~0925-9635.
|
