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@inproceedings{401791,
author = {Klapetek, Petr and Franta, Daniel and Ohlídal, Ivan},
address = {Braunschweig},
booktitle = {Proceedings of the 4th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods},
keywords = {AFM},
language = {eng},
location = {Braunschweig},
isbn = {3-89701-840-3},
pages = {107-117},
publisher = {Physikalisch-Technische Bundesanstalt},
title = {Study of Thin Film Defects by Atomic Force Microscopy},
url = {http://hydra.physics.muni.cz/~franta/bib/PTBF44_107.html},
year = {2001}
}
TY - JOUR
ID - 401791
AU - Klapetek, Petr - Franta, Daniel - Ohlídal, Ivan
PY - 2001
TI - Study of Thin Film Defects by Atomic Force Microscopy
PB - Physikalisch-Technische Bundesanstalt
CY - Braunschweig
SN - 3897018403
KW - AFM
UR - http://hydra.physics.muni.cz/~franta/bib/PTBF44_107.html
N2 - In the contribution results concerning the study of some defects of thin films will be presented. It is shown that surface defects of the upper boundaries of the films such as microroughness, microobjects and facates can be studied quantitatively. Concrete results are presented for the upper boundaries of the films formed by the following materials: HfO2, ZnSe and ZnTe. As for microroughness the values of the basic statistical quantities, i.e. the rms values of the hights, the values of the autocorrelation length and the values of the power spectral density function are presented for the film mentioned. Further, the misrepresentation concernings the results of the AFM measurements of the upper boundaries of the columnar thin films is briefly discussed.
ER -
KLAPETEK, Petr, Daniel FRANTA and Ivan OHLÍDAL. Study of Thin Film Defects by Atomic Force Microscopy. In \textit{Proceedings of the 4th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods}. Braunschweig: Physikalisch-Technische Bundesanstalt, 2001, p.~107-117. ISBN~3-89701-840-3.
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