| BURŠÍKOVÁ, Vilma, Vladislav NAVRÁTIL, Lenka ZAJÍČKOVÁ and Jan JANČA. Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD. Materials Science and Engineering A. Elsevier Science, 2002, vol. 2002, No 324, p. 251-254. ISSN 0921-5093. |
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@article{402313,
author = {Buršíková, Vilma and Navrátil, Vladislav and Zajíčková, Lenka and Janča, Jan},
article_number = {324},
keywords = {Temperature dependence; mechanical properties; DLC; PECVD},
language = {eng},
issn = {0921-5093},
journal = {Materials Science and Engineering A},
title = {Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD},
volume = {2002},
year = {2002}
}
TY - JOUR
ID - 402313
AU - Buršíková, Vilma - Navrátil, Vladislav - Zajíčková, Lenka - Janča, Jan
PY - 2002
TI - Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD
JF - Materials Science and Engineering A
VL - 2002
IS - 324
SP - 251
EP - 251
PB - Elsevier Science
SN - 09215093
KW - Temperature dependence
KW - mechanical properties
KW - DLC
KW - PECVD
N2 - The mechanical properties of hard protective DLC/Si films deposited by PECVD from Ar-CH4-HMDSO mixture have been analyzed using microindentation techniques as the main characterisation tool. The formation and development of crack lines and patterns have been studied to determine fracture toughness of the film and of the interface as a function of temperature.
ER -
BURŠÍKOVÁ, Vilma, Vladislav NAVRÁTIL, Lenka ZAJÍČKOVÁ and Jan JANČA. Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD. \textit{Materials Science and Engineering A}. Elsevier Science, 2002, vol.~2002, No~324, p.~251-254. ISSN~0921-5093.
|
