Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

BURŠÍKOVÁ, Vilma, Vladislav NAVRÁTIL, Lenka ZAJÍČKOVÁ and Jan JANČA. Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD. Materials Science and Engineering A. Elsevier Science, 2002, vol. 2002, No 324, p. 251-254. ISSN 0921-5093.

Basic information

Original name

Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD

Authors

BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor), Vladislav NAVRÁTIL (203 Czech Republic), Lenka ZAJÍČKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic)

Edition

Materials Science and Engineering A, Elsevier Science, 2002, 0921-5093

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.107

RIV identification code

RIV/00216224:14310/02:00005633

Organization unit

Faculty of Science

UT WoS

000174084000044

Keywords in English

Temperature dependence; mechanical properties; DLC; PECVD

Tags

DLC, mechanical properties, PECVD, temperature dependence

Tags

International impact, Reviewed

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Abstract

V originále

The mechanical properties of hard protective DLC/Si films deposited by PECVD from Ar-CH4-HMDSO mixture have been analyzed using microindentation techniques as the main characterisation tool. The formation and development of crack lines and patterns have been studied to determine fracture toughness of the film and of the interface as a function of temperature.

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Links

GA202/00/P037, research and development project	Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
ME 301, research and development project	Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings
MSM 143100003, plan (intention)	Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates