Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings

BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL and Lenka ZAJÍČKOVÁ. Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings. Journal of Non-Crystalline Solids. Nizozemsko: Elsevier Science B.V., 2002, vol. 2002, 299-302, p. 1147-1151. ISSN 0022-3093.

Basic information

Original name

Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings

Authors

BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor, belonging to the institution), Petr SLÁDEK (203 Czech Republic, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution) and Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution)

Edition

Journal of Non-Crystalline Solids, Nizozemsko, Elsevier Science B.V. 2002, 0022-3093

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Netherlands

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.435

RIV identification code

RIV/00216224:14310/02:00005785

Organization unit

Faculty of Science

UT WoS

000175757600083

Keywords in English

silicon solar cells; antireflective coatings; diamond-like films; PECVD

Tags

antireflective coatings, diamond-like films, PECVD, silicon solar cells

Tags

International impact, Reviewed

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Abstract

V originále

Silicon incorporated diamond-like antireflective coatings were deposited upon the silicon solar cells in order to improve their efficiency. The films were prepared by plasma enhanced chemical vapor deposition (PECVD) technique from the mixture of hexamethyldisiloxane (HMDSO) and methane. The optical and tribological properties of the coatings could be easily changed by the percentage of the HMDSO in the deposition feed.

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Links

GA202/00/P037, research and development project	Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
GA202/01/1110, research and development project	Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method
MSM 143100003, plan (intention)	Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
OC 527.20, research and development project	Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate