Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings

BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL and Lenka ZAJÍČKOVÁ. Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings. Journal of Non-Crystalline Solids. Nizozemsko: Elsevier Science B.V., 2002, vol. 2002, 299-302, p. 1147-1151. ISSN 0022-3093.

Basic information

• Original name: Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings
• Authors: BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor, belonging to the institution), Petr SLÁDEK (203 Czech Republic, belonging to the institution), Pavel SŤAHEL (203 Czech Republic, belonging to the institution) and Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution).
• Edition: Journal of Non-Crystalline Solids, Nizozemsko, Elsevier Science B.V. 2002, 0022-3093.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Netherlands
• Confidentiality degree: is not subject to a state or trade secret
• Impact factor: Impact factor: 1.435
• RIV identification code: RIV/00216224:14310/02:00005785
• Organization unit: Faculty of Science
• UT WoS: 000175757600083
• Keywords in English: silicon solar cells; antireflective coatings; diamond-like films; PECVD
• Tags: antireflective coatings, diamond-like films, PECVD, silicon solar cells
• Tags: International impact, Reviewed

Abstract

Silicon incorporated diamond-like antireflective coatings were deposited upon the silicon solar cells in order to improve their efficiency. The films were prepared by plasma enhanced chemical vapor deposition (PECVD) technique from the mixture of hexamethyldisiloxane (HMDSO) and methane. The optical and tribological properties of the coatings could be easily changed by the percentage of the HMDSO in the deposition feed.

Links

• GA202/00/P037, research and development project: Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu

Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used

• GA202/01/1110, research and development project: Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method

• MSM 143100003, plan (intention): Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates

• OC 527.20, research and development project: Name: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů

Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate