KLAPETEK, Petr, Ivan OHLÍDAL, Daniel FRANTA and Pavel POKORNÝ. Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method. Surface and Interface Analysis. USA: John Wiley & Sons, 2002, vol. 34, No 1, p. 559-564. ISSN 0142-2421. |
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@article{404727, author = {Klapetek, Petr and Ohlídal, Ivan and Franta, Daniel and Pokorný, Pavel}, article_location = {USA}, article_number = {1}, keywords = {ZrO2 and Hfo2 films; AFM; optical methods; rough upper boundaries}, language = {eng}, issn = {0142-2421}, journal = {Surface and Interface Analysis}, title = {Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method}, url = {http://www.physics.muni.cz/~franta/bib/SIA34_559.html}, volume = {34}, year = {2002} }
TY - JOUR ID - 404727 AU - Klapetek, Petr - Ohlídal, Ivan - Franta, Daniel - Pokorný, Pavel PY - 2002 TI - Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method JF - Surface and Interface Analysis VL - 34 IS - 1 SP - 559 EP - 559 PB - John Wiley & Sons SN - 01422421 KW - ZrO2 and Hfo2 films KW - AFM KW - optical methods KW - rough upper boundaries UR - http://www.physics.muni.cz/~franta/bib/SIA34_559.html N2 - In this paper an atomic force microscopy analysis of the microrough upper boundaries of ZrO2 and HfO2 thin films is presented. Within this analysis the values of the width, root-mean-square value of heights and power spectral density function of these boundaries are determined for ZrO2 and HfO2 exhibiting different thicknesses. The thickness dependences of the quantities mentioned are introduced. The values of the thicknesses of the films are evaluated using the combined optical method. This optical method is also used to describe boundary microroughness within the effective medium theory. A discussion of the results concerning the microroughness of the upper boundaries of both the ZrO2 and HfO2 thin films is also introduced. ER -
KLAPETEK, Petr, Ivan OHLÍDAL, Daniel FRANTA and Pavel POKORNÝ. Analysis of the boundaries of ZrO2 and HfO2 thin films by atomic force microscopy and the combined optical method. \textit{Surface and Interface Analysis}. USA: John Wiley \&{} Sons, 2002, vol.~34, No~1, p.~559-564. ISSN~0142-2421.
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