| KLAPETEK, Petr, Ivan OHLÍDAL a Daniel FRANTA. Applications of atomic force microscopy for thin film boundary measurements. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, roč. 47, 6-7, s. 195-199. ISSN 0447-6441. 2002. |
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@article{404728,
author = {Klapetek, Petr and Ohlídal, Ivan and Franta, Daniel},
article_location = {Přerov},
article_number = {6-7},
keywords = {Roughness; Atomic Force Microscopy},
language = {eng},
issn = {0447-6441},
journal = {Jemná mechanika a optika},
title = {Applications of atomic force microscopy for thin film boundary measurements},
url = {http://hydra.physics.muni.cz/~franta/bib/JMO2002_195.html},
volume = {47},
year = {2002}
}
TY - JOUR
ID - 404728
AU - Klapetek, Petr - Ohlídal, Ivan - Franta, Daniel
PY - 2002
TI - Applications of atomic force microscopy for thin film boundary measurements
JF - Jemná mechanika a optika
VL - 47
IS - 6-7
SP - 195-199
EP - 195-199
PB - Physical Institute, ASCR
SN - 04476441
KW - Roughness
KW - Atomic Force Microscopy
UR - http://hydra.physics.muni.cz/~franta/bib/JMO2002_195.html
N2 - In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of the columnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentation of the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results of the surface reconstruction algorithm effects on improving the values of the statistical parameters are presented too.
ER -
KLAPETEK, Petr, Ivan OHLÍDAL a Daniel FRANTA. Applications of atomic force microscopy for thin film boundary measurements. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, roč.~47, 6-7, s.~195-199. ISSN~0447-6441. 2002.
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