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@inproceedings{407588, author = {Sládek, Petr and Sťahel, Pavel}, address = {Bratislava}, booktitle = {Conference Proceedings of Inter-Academia 2002}, edition = {1}, keywords = {plasma deposition;surface energy; atmospheric discharge}, language = {eng}, location = {Bratislava}, isbn = {80-968253-6-4}, pages = {237-243}, publisher = {Comenius University and Union of Slovak Mathematicians and Physicists, Bratislava}, title = {Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion}, year = {2002} }
TY - JOUR ID - 407588 AU - Sládek, Petr - Sťahel, Pavel PY - 2002 TI - Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion PB - Comenius University and Union of Slovak Mathematicians and Physicists, Bratislava CY - Bratislava SN - 8096825364 KW - plasma deposition;surface energy KW - atmospheric discharge N2 - Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion ER -
SLÁDEK, Petr and Pavel SŤAHEL. Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion. In \textit{Conference Proceedings of Inter-Academia 2002}. 1st ed. Bratislava: Comenius University and Union of Slovak Mathematicians and Physicists, Bratislava, 2002, p.~237-243. ISBN~80-968253-6-4.
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