SLÁDEK, Petr and Pavel SŤAHEL. Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion. In Conference Proceedings of Inter-Academia 2002. 1st ed. Bratislava: Comenius University and Union of Slovak Mathematicians and Physicists, Bratislava, 2002, p. 237-243. ISBN 80-968253-6-4.
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Basic information
Original name Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion
Authors SLÁDEK, Petr (203 Czech Republic, guarantor) and Pavel SŤAHEL (203 Czech Republic).
Edition 1. vyd. Bratislava, Conference Proceedings of Inter-Academia 2002, p. 237-243, 2002.
Publisher Comenius University and Union of Slovak Mathematicians and Physicists, Bratislava
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14410/02:00007014
Organization unit Faculty of Education
ISBN 80-968253-6-4
Keywords in English plasma deposition;surface energy; atmospheric discharge
Tags atmospheric discharge, plasma deposition, Surface energy
Tags Reviewed
Changed by Changed by: doc. RNDr. Petr Sládek, CSc., učo 1617. Changed: 18/1/2007 10:41.
Abstract
Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion
Links
MSM 143100003, plan (intention)Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates
OC 527.20, research and development projectName: Plazmochemické depozice a plazmochemické opracování povrchu pevných substrátů
Investor: Ministry of Education, Youth and Sports of the CR, Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
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