FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK and Pavel POKORNÝ. Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods. Surface and Interface Analysis. USA: John Wiley & Sons, 2002, vol. 34, No 1, p. 759-762. ISSN 0142-2421. |
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@article{407667, author = {Franta, Daniel and Ohlídal, Ivan and Klapetek, Petr and Pokorný, Pavel}, article_location = {USA}, article_number = {1}, keywords = {TiO2 thin films; optical characterization; AFM; boundary roughness}, language = {eng}, issn = {0142-2421}, journal = {Surface and Interface Analysis}, title = {Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods}, url = {http://hydra.physics.muni.cz/~franta/bib/SIA34_759.html}, volume = {34}, year = {2002} }
TY - JOUR ID - 407667 AU - Franta, Daniel - Ohlídal, Ivan - Klapetek, Petr - Pokorný, Pavel PY - 2002 TI - Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods JF - Surface and Interface Analysis VL - 34 IS - 1 SP - 759-762 EP - 759-762 PB - John Wiley & Sons SN - 01422421 KW - TiO2 thin films KW - optical characterization KW - AFM KW - boundary roughness UR - http://hydra.physics.muni.cz/~franta/bib/SIA34_759.html N2 - In this paper slight roughness of the upper boundaries of TiO2 thin films prepared on substrates formed by single-crystal silicon is studied. Atomic force microscopy (AFM) and an optical method based on combining variable-angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry are used for this purpose. It is shown that the values of the basic statistical quantities characterizing this roughness depend quite strongly on the values of the thicknesses of these films (they increase with increasing thickness). Differences observed between the values of the basic statistical parameters determined by AFM and the optical method are explained. It is also shown that the TiO2 films exhibit an inhomogeneity represented by a profile of the complex refractive index. ER -
FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK and Pavel POKORNÝ. Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods. \textit{Surface and Interface Analysis}. USA: John Wiley \&{} Sons, 2002, vol.~34, No~1, p.~759-762. ISSN~0142-2421.
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