1994

Principles of plasma discharges and materials processing

LIEBERMAN, M. A. and Allan J. LICHTENBERG

Basic information

Original name

Principles of plasma discharges and materials processing

Authors

LIEBERMAN, M. A. and Allan J. LICHTENBERG

Edition

New York, xxvi, 572, 1994

Publisher

John Wiley & Sons

Other information

ISBN

0471005770
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