LIEBERMAN, M. A. and Allan J. LICHTENBERG. Principles of plasma discharges and materials processing. New York: John Wiley & Sons, 1994, xxvi, 572. ISBN 0471005770.
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Basic information
Original name Principles of plasma discharges and materials processing
Authors LIEBERMAN, M. A. and Allan J. LICHTENBERG.
Edition New York, xxvi, 572, 1994.
Publisher John Wiley & Sons
Other information
ISBN 0471005770
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