ZAJÍČKOVÁ, Lenka, Pavel DVOŘÁK, Vít KUDRLE and Radek ŠMÍD. Study of mode transition in low pressure capacitive RF discharges in nitrogen. Czech. J. Phys. Praha: IOP AS CR, 2002, vol. 52, No 52, p. 427-432. ISSN 0011-4626. |
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@article{483183, author = {Zajíčková, Lenka and Dvořák, Pavel and Kudrle, Vít and Šmíd, Radek}, article_location = {Praha}, article_number = {52}, keywords = {RF discharge; mode transition; sheath}, language = {eng}, issn = {0011-4626}, journal = {Czech. J. Phys.}, title = {Study of mode transition in low pressure capacitive RF discharges in nitrogen}, volume = {52}, year = {2002} }
TY - JOUR ID - 483183 AU - Zajíčková, Lenka - Dvořák, Pavel - Kudrle, Vít - Šmíd, Radek PY - 2002 TI - Study of mode transition in low pressure capacitive RF discharges in nitrogen JF - Czech. J. Phys. VL - 52 IS - 52 SP - 427 EP - 427 PB - IOP AS CR SN - 00114626 KW - RF discharge KW - mode transition KW - sheath N2 - We have studied the mode transition in low pressure capacitive RF discharges in nitrogen ER -
ZAJÍČKOVÁ, Lenka, Pavel DVOŘÁK, Vít KUDRLE and Radek ŠMÍD. Study of mode transition in low pressure capacitive RF discharges in nitrogen. \textit{Czech. J. Phys.}. Praha: IOP AS CR, 2002, vol.~52, No~52, p.~427-432. ISSN~0011-4626.
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