| ZAJÍČKOVÁ, Lenka, Pavel DVOŘÁK, Vít KUDRLE and Radek ŠMÍD. Study of mode transition in low pressure capacitive RF discharges in nitrogen. Czech. J. Phys. Praha: IOP AS CR, 2002, vol. 52, No 52, p. 427-432. ISSN 0011-4626. |
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@article{483183,
author = {Zajíčková, Lenka and Dvořák, Pavel and Kudrle, Vít and Šmíd, Radek},
article_location = {Praha},
article_number = {52},
keywords = {RF discharge; mode transition; sheath},
language = {eng},
issn = {0011-4626},
journal = {Czech. J. Phys.},
title = {Study of mode transition in low pressure capacitive RF discharges in nitrogen},
volume = {52},
year = {2002}
}
TY - JOUR
ID - 483183
AU - Zajíčková, Lenka - Dvořák, Pavel - Kudrle, Vít - Šmíd, Radek
PY - 2002
TI - Study of mode transition in low pressure capacitive RF discharges in nitrogen
JF - Czech. J. Phys.
VL - 52
IS - 52
SP - 427
EP - 427
PB - IOP AS CR
SN - 00114626
KW - RF discharge
KW - mode transition
KW - sheath
N2 - We have studied the mode transition in low pressure capacitive RF discharges in nitrogen
ER -
ZAJÍČKOVÁ, Lenka, Pavel DVOŘÁK, Vít KUDRLE and Radek ŠMÍD. Study of mode transition in low pressure capacitive RF discharges in nitrogen. \textit{Czech. J. Phys.}. Praha: IOP AS CR, 2002, vol.~52, No~52, p.~427-432. ISSN~0011-4626.
|
