ELIÁŠ, Marek, Jaromír ŽÍLA, Jan JANČA and Vlastimil BROŽEK. Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors. Czech. Jourmal of Physics. Praha: Institute of Physics Academy of Sciences, 2002, vol. 2002, No 52, p. 857-1716. ISSN 001-4626. |
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@article{483495, author = {Eliáš, Marek and Žíla, Jaromír and Janča, Jan and Brožek, Vlastimil}, article_location = {Praha}, article_number = {52}, keywords = {tungsten; titaniun; plasma; ICP}, language = {eng}, issn = {001-4626}, journal = {Czech. Jourmal of Physics}, title = {Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors}, volume = {2002}, year = {2002} }
TY - JOUR ID - 483495 AU - Eliáš, Marek - Žíla, Jaromír - Janča, Jan - Brožek, Vlastimil PY - 2002 TI - Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors JF - Czech. Jourmal of Physics VL - 2002 IS - 52 SP - 857 EP - 857 PB - Institute of Physics Academy of Sciences SN - 0014626 KW - tungsten KW - titaniun KW - plasma KW - ICP N2 - Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors ER -
ELIÁŠ, Marek, Jaromír ŽÍLA, Jan JANČA and Vlastimil BROŽEK. Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors. \textit{Czech. Jourmal of Physics}. Praha: Institute of Physics Academy of Sciences, 2002, vol.~2002, No~52, p.~857-1716. ISSN~001-4626.
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